Polycapillary X-ray optics (capillary X-ray lens) are now popular in X-ray
fluorescence (XRF) analysis. Such an X-ray lens can collect X-rays emitted
from an X-ray source in a large solid angle and form a very intense X-ray m
icrobeam which is very convenient for microbeam X-ray fluorescence (MXRF) a
nalysis giving low minimum detection limits (MDLs) in energy dispersive X-r
ay fluorescence (EDXRF). A new method called position sensitive X-ray spect
rometry (PSXS) which combines an X-ray lens used to form an intense XRF sou
rce and a position sensitive detector (PSD) used for wavelength dispersive
spectrometry (WDS) measurement was developed recently in the X-ray Optics L
aboratory of Institute of Low Energy Nuclear Physics (ILENP) at Beijing Nor
mal University. Such a method can give high energy and spacial resolution a
nd high detection efficiency simultaneously. A short view of development of
both the EDXRF using a capillary X-ray lens and the new PSXS is given in t
his paper. (C) 2000 Elsevier Science B.V. All rights reserved.