A study on the effect of air on the dynamic motion of a MEMS device and its shape optimization

The authors propose a new design concept for controlling the deflection of a micro-membrane with the aid of its thickness distribution for realizing a prescribed design in the MEMS. As an example, the authors treat a micro ai r pump that comprises a micro-membrane. The membrane is actuated by an elec trostatic force. The membrane deflects and thus the deflection is influence d by the air pressure and the electrostatic field. This is a highly complic ated system. To find out a proper thickness distribution, the authors use t he genetic algorithm that is appropriate to reduce the searching space of s olution.