ANALYSES OF SPATIALLY-RESOLVED ELECTRON-ENERGY DISTRIBUTION AND TRANSPORT-PROPERTIES IN STEADY-STATE IN CF4

Under homogeneous electrostatic field in gas between two plane electro des, the electron energy distribution and transport properties near th e electrodes are usually position dependent. Boltzmann equation analys es for such position dependent energy distribution and transport prope rties in steady state are very few due to its difficulty. In this pape r, position dependent electron behaviors in CF4 calculated using the S teady State Townsend flight time integral method (SST-FTI) for several boundary conditions are presented with the theory of the SST-FTI.