DECONVOLUTION OF ESR-SPECTRA AND THEIR LIGHT-INDUCED EFFECT IN A-SI-H

It is shown that ESR spectra of dangling bonds in a-Si:H for glow disc harge samples are deconvoluted into two components due to normal dangl ing bonds and H-related dangling bonds. The component for H-related da ngling bonds has anisotropic g-values and anisotropic hyperfine coupli ng constants of H-1. The distance between the dangling bond site and h ydrogen site is estimated to be 2 Angstrom, using a tight binding theo ry. The normal dangling bonds constitute about 60% of the total spin d ensity, while the H-related dangling bonds give about 40% for glow dis charge samples. The glow discharge samples were also illuminated by a xenon lamp with 600 mW/cm(2) at room temperature. The normal dangling bonds and H-related dangling bonds are created almost equally by illum ination.