L-shell ionization measurement of tungsten by electron impact

L-shell partial production cross sections of L-alpha-, L-beta-, L-gamma- ra ys by electron impact were measured by observing the counts of X-ray from i mpacted thin tungsten target. Total production cross sections and mean ioni zation cross sections were deduced from these measured results. The electro n beam energy range was from II to 36 keV. Tungsten was sputtered onto a ca rbon backing to reduce bremsstrahlung of the backing. The effect of electro ns reflected by the backing has been corrected. Comparison with two theoret ical calculations has performed. The experimental results agree rather well with the theoretical predications.