1.5 mu m luminescence characteristic of erbium in B, P doped a-SiO : H films

Hydrogenated amorphous silicon films co-doped with oxygen (O), boron (B) an d phosphorus (P) were fabricated using PECVD technique. The erbium (Er) imp lanted samples were annealed in a N-2 ambient by rapid thermal annealing. S trong photoluminescence (PL) spectra of these samples were observed at room temperature. The incorporation of O, B and P could not only enhance the PL intensity but also the thermal annealing temperature of the strongest PL i ntensity. It seems that the incorporation of B or P can decrease the grain boundary potential barriers thus leading to an easier movement of carriers and a stronger PL intensity. Temperature dependence of PL indicated the the rmal quenching of Er-doped hydrogenated amorphous silicon is very weak.