ESD-induced degradation of vertical-cavity surface-emitting lasers

The sensitivity of proton implanted, vertical-cavity surface-emitting laser s (VCSELs) to electrostatic discharge (ESD) pulses is investigated under hu man body model test conditions. Rather low degradation threshold pulse ampl itudes were observed in forward bias (+1500V) as well as reverse bias (-800 V) step stress tests. Monitoring both the electrical and optical parameters of the VCSELs during ESD stress, it was found that in forward bias ESD str ess tests the optical degradation precedes the electrical degradation.