Citation
Sp. Beeby et Nm. White, Thick-film PZT-silicon micromechanical resonator, ELECTR LETT, 36(19), 2000, pp. 1661-1662
Citations number
6
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
ELECTRONICS LETTERS
ISSN journal
00135194
→ ACNP
Volume
36
Issue
19
Year of publication
2000
Pages
1661 - 1662
Database
ISI
SICI code
0013-5194(20000914)36:19<1661:TPMR>2.0.ZU;2-J
Abstract
A micromechanical silicon beam resonator in which the vibrations are driven
and detected by thick-film printed piezoelectric elements is presented. St
andard micromachining and thick-film processes have been successfully combi
ned to fabricate the device. The resonator, 2mm long and 0.52mm wide, has a
fundamental mode in air at 56.5 kHz with a Q-factor of 70.