Hybrid polyimide/Ta2O5/polyimide antiresonant reflecting optical waveguides

Authors
Chu, AK Lee, KM Pong, BJ Lin, CJ Ho, WJ Shih, TT
Citation
Ak. Chu et al., Hybrid polyimide/Ta2O5/polyimide antiresonant reflecting optical waveguides, ELECTR LETT, 36(18), 2000, pp. 1539-1540
Citations number
7
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
ELECTRONICS LETTERS
ISSN journal
00135194 → ACNP
Volume
36
Issue
18
Year of publication
2000
Pages
1539 - 1540
Database
ISI
SICI code
0013-5194(20000831)36:18<1539:HPAROW>2.0.ZU;2-C
Abstract
A hybrid polyimide/Ta2O5/polyimide antiresonant reflecting optical waveguid e (ARROW) is presented. The ARROW consists of fluorinated polyimide and tan talum pentoxide hybrid layers deposited on Si substrates. The propagation l osses of the device are 0.6 and 2.6dB/cm ar 1.3 mu m for TE and TM polarise d lights, respectively.