Mixing effect on a nonequilibrium RF induction plasma

An experimental study was conducted to clarify the effect of secondary gas mixing on the thermo-fluid II characteristics of a nonequilibrium RF induct ion plasma. The premixed argon and helium gas was introduced into a reactor to produce a RF induction plasma in a low operating pressure. It is shown that there are large effects of helium gas injection location and guide len gth on the plasma luminous area, operating limit of stable plasma, concentr ation and temperature fields of a RF induction plasma. A visualization stud y was also conducted to correspond to the variation of plasma configuration s by premixing with helium gas.