Optical MEMS

Recently the applications of MEMS (micro electro mechanical systems) have m ade remarkable progress in many filelds. The optical application of MEMS is one of the most promising because it provides micro mechano optical device s, the key components for high-perfromance systems in optical communication networks and data storage devices. This paper disucces the impacts of MEMS techologies on optical systems. Furthermore, state-of-the-art exmaples of micro optical switches, pigtailed tunable filters and two-dimensional MEMS optical scanners are described.