Citation
Xd. Bai et al., Size effect of electromagnetic constitutive characteristics of ultrathin Al films, J MAT SCI T, 16(5), 2000, pp. 540-542
Citations number
7
Categorie Soggetti
Material Science & Engineering
Journal title
JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY
ISSN journal
10050302
→ ACNP
Volume
16
Issue
5
Year of publication
2000
Pages
540 - 542
Database
ISI
SICI code
1005-0302(200009)16:5<540:SEOECC>2.0.ZU;2-M
Abstract
The ultrathin aluminum films with thickness in the range of 2 similar to 60
nm have been deposited by de magnetron sputtering apparatus. Reflectance a
nd transmittance of the obtained samples were measured with a WFZ-900-D4 UV
/VIS spectrophotometer. The optical constant (n, k) and permittivity (epsil
on', epsilon ") were determined by applying Newton-Simpson recurrent substi
tution method. The results indicate that the electromagnetic constitutive c
haracteristic of ultrathin aluminum films is a function of thickness and ha
s obvious size effect.