NANOSCALE DETERMINATION OF PHASE-VELOCITY BY SCANNING ACOUSTIC FORCE MICROSCOPY

Authors
CHILLA E HESJEDAL T FROHLICH HJ
Citation
E. Chilla et al., NANOSCALE DETERMINATION OF PHASE-VELOCITY BY SCANNING ACOUSTIC FORCE MICROSCOPY, Physical review. B, Condensed matter, 55(23), 1997, pp. 15852-15855
Citations number
26
Categorie Soggetti
Physics, Condensed Matter
Journal title
Physical review. B, Condensed matter → ACNP
ISSN journal
01631829
Volume
55
Issue
23
Year of publication
1997
Pages
15852 - 15855
Database
ISI
SICI code
0163-1829(1997)55:23<15852:NDOPBS>2.0.ZU;2-O
Abstract
We measured the phase velocity of surface acoustic waves (SAW's) with a scanning acoustic force microscope (SAFM) and achieved a maximum lat eral resolution of 19.9 nm. The phase measurement of high-frequency wa ves with a slowly responding SAFM cantilever was perfomed by frequency mixing at its nonlinear force curve. For Au layers of different thick nesses the SAW dispersion was studied on a lateral scale of 200 nm and compared to calculated data.