ZrO2 thin films and ZrO2/SiO2 optical reflection filters deposited by sol-gel method

Authors
Zhang, QY Li, XL Shen, J Wu, GM Wang, J Chen, LY
Citation
Qy. Zhang et al., ZrO2 thin films and ZrO2/SiO2 optical reflection filters deposited by sol-gel method, MATER LETT, 45(6), 2000, pp. 311-314
Citations number
9
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
MATERIALS LETTERS
ISSN journal
0167577X → ACNP
Volume
45
Issue
6
Year of publication
2000
Pages
311 - 314
Database
ISI
SICI code
0167-577X(200010)45:6<311:ZTFAZO>2.0.ZU;2-M
Abstract
rO(2) thin films were deposited by a wet chemical sol-gel method from force d hydrolysis of aqueous ZrOCl2 solution. Transmission electron microscopic observations confirmed the existence of little nanosized monoclinic ZrO2 pa rticles in clear stable ethanolic ZrO2 colloidal suspensions. Twenty layers of ZrO2/SiO2 high reflectance filters using a quarterwave stack were fabri cated by sol-gel spin-coating on K9 glass substrate. This filter exhibits a wide reflectance band near 1064 nm and a high transmittance region. (C) 20 00 Elsevier Science B.V. All rights reserved.