SEM calibration in the micrometer and submicrometer ranges by means of a periodic linear measure

Authors
Volk, CP Novikov, YA Rakov, AV
Citation
Cp. Volk et al., SEM calibration in the micrometer and submicrometer ranges by means of a periodic linear measure, MEAS TECH R, 43(4), 2000, pp. 346-352
Citations number
17
Categorie Soggetti
Instrumentation & Measurement
Journal title
MEASUREMENT TECHNIQUES
ISSN journal
05431972 → ACNP
Volume
43
Issue
4
Year of publication
2000
Pages
346 - 352
Database
ISI
SICI code
0543-1972(200004)43:4<346:SCITMA>2.0.ZU;2-N
Abstract
A periodic linear measure is described for use in scanning electron microsc opes, which has eight values for line width in the micrometer and submicrom eter ranges. Methods have been developed for calibrating the SEM with such a measure, which are not sensitive to errors in beam focusing.