Optically, defined multifunctional patterning of photosensitive thin-film silica mesophases

Citation
Da. Doshi et al., Optically, defined multifunctional patterning of photosensitive thin-film silica mesophases, SCIENCE, 290(5489), 2000, pp. 107-111
Citations number
24
Categorie Soggetti
Multidisciplinary,Multidisciplinary,Multidisciplinary
Journal title
SCIENCE
ISSN journal
00368075 → ACNP
Volume
290
Issue
5489
Year of publication
2000
Pages
107 - 111
Database
ISI
SICI code
0036-8075(20001006)290:5489<107:ODMPOP>2.0.ZU;2-7
Abstract
Photosensitive films incorporating molecular photoacid generators compartme ntalized within a silica-surfactant mesophase were prepared by an evaporati on-induced self-assembly process. Ultraviolet exposure promoted localized a cid-catalyzed siloxane condensation, which can be used for selective etchin g of unexposed regions; for "gray-scale" patterning of refractive index, po re size, surface area, and wetting behavior; and for optically defining a m esophase transformation (from hexagonal to tetragonal) within the film. The ability to optically define and continuously central both structure and fu nction on the macro- and mesoscales is of interest for sensor arrays, nanor eactors, photonic and fluidic devices, and low-dielectric-constant films.