The challenges of macro integration for fully automated 300mm fabs

With 300mm wafer processing, the industry should finally realize the dream of hands-off wafer processing - a factory run by a finely tuned "silicon ma chine." The route to this concept will require some rigorous and fundamenta l changes by those responsible for fab automation, however. For example, th e industry must address the accuracy, access, and application of process to ol data; suppliers must step up to the ownership of fab-wide integration of production resources; and everyone must adopt the principles of industrial engineering.