Simulation modeling for 300mm semiconductor factories

A generic factory is the root model that can be easily altered to perform e xperiments to evaluate 300mm fab layouts and operations, in this case a fac tory running a single 180nm logic process flow and starting 20,000 wafers/m onth. Experiments performed have included looking at the effects of various factors on factory productivity as defined by cycle time, work in process inventory, and tool utilization. These experiments include studying the eff ects of AMHS equipment downtime, multiple process flows, the number of stoc kers, and the method of material transport. The simulation models show that the published International SEMATECH Vision of a fully automated factory w ould sufficiently support the production requirements of a 300mm factory.