An evaluation of the behavior-based equipment model

While SECS/GEM is the prevalent communication standard for semiconductor ma nufacturing equipment, it does not encompass recent developments in softwar e engineering and networking. For example, it does not support multiple hos t applications. On the other hand, the proposed behavior-based equipment mo del or B-BEM has been developed to meet current and future industry automat ion needs. Here, B-BEM is compared to existing standards and used in its fi rst implementation - a semiconductor assembly operation.