A re-examination of silicon wafer specifications

Authors
Citation
Hr. Huff, A re-examination of silicon wafer specifications, SOL ST TECH, 43(10), 2000, pp. 210
Citations number
2
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
SOLID STATE TECHNOLOGY
ISSN journal
0038111X → ACNP
Volume
43
Issue
10
Year of publication
2000
Database
ISI
SICI code
0038-111X(200010)43:10<210:AROSWS>2.0.ZU;2-6