Emission spectrum diagnostics of argon DC discharge

An experimental setup has been built to carry out DC glow discharge and mic rowave ECR discharge and to depict the space-resolved emission spectra of t he discharges. The setup is characterized by its optical collection system that is capable of being finely displaced. The emission spectra in the visi ble region of argon DC discharge have been measured to study the relative d ensities of some species and their response to discharge conditions, such a s pressure and DC voltage. Also, the density variation with discharge condi tions of some interested species, for example, the excited state Ar (F-2(32 )), has been given extraordinary notice, in order to find out the most suit able situation for more extensive investigation of argon plasma. (C) 2000 E lsevier Science Ltd. All rights reserved.