Layout has strong influence on matching properties of a circuit. Current ma
tching models, which characterize both local random non-uniformities and gl
obal systematic non-uniformities stochastically, are not adequate for the m
atching analysis taking the effect of layout realization into account. In o
rder to consider topological information of layout into matching analysis,
we propose a matching model which treats the random and systematic componen
ts separately. Also, we characterize the micro-loading effect, which modula
tes fabricated line-width according to the local density of layout patterns
, into matching analysis. With these two techniques, we can perform matchin
g analysis of CMOS circuits taking layout information into account.