M. Sumiya et al., Structural analysis of InxGa1-xN single quantum wells by coaxial-impact collision ion scattering spectroscopy, APPL PHYS L, 77(16), 2000, pp. 2512-2514
The structures of InxGa1-xN single quantum wells (SQWs) on 3-mu m-thick GaN
layer for the ultraviolet, blue, and green light-emitting devices were inv
estigated by coaxial-impact collision ion scattering spectroscopy (CAICISS)
. The possibility that CAICISS could analyze structural fluctuation of the
ternary system like InxGa1-xN was demonstrated. It was found that In incorp
orated into InGaN SQWs occupied the substitutional site of Ga atom having G
a-face (+c) polarity. (C) 2000 American Institute of Physics. [S0003- 6951(
00)03442-2].