We report the confirmed occurrence of Fowler-Nordheim hole tunneling in p-4
H-SiC metal-oxide-semiconductor capacitor structures. The effective mass fo
r holes in the oxide is found to be in the range of 0.35m-0.52m, where m is
the free electron mass. (C) 2000 American Institute of Physics. [S0003-695
1(00)00342-9].