We have heteroepitaxially deposited Ba0.6Sr0.4TiO3 (BST) thin films on (001
)-oriented MgO substrates using pulsed-laser deposition. By optimizing the
deposition temperature and adjusting the film thickness, we have successful
ly increased the dielectric nonlinearity and decreased the dielectric loss
of BST films. BST thin films grown at 750 degrees C with a thickness of 1.1
mu m showed a dielectric constant tunability of greater than 65% and a tun
ability/loss of 43 at a surface electric field of 80 kV/cm at room temperat
ure. X-ray diffraction and transmission electron microscopy analyses indica
ted that the tunability and dielectric loss were closely related to the cry
stallinity of the BST films. (C) 2000 American Institute of Physics. [S0003
-6951(00)00742-7].