ELECTRON-IMPACT CROSS-SECTION DATA FOR CARBON TETRAFLUORIDE

Authors
BONHAM RA
Citation
Ra. Bonham, ELECTRON-IMPACT CROSS-SECTION DATA FOR CARBON TETRAFLUORIDE, JPN J A P 1, 33(7B), 1994, pp. 4157-4164
Citations number
32
Categorie Soggetti
Physics, Applied
Journal title
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS → ACNP
Volume
33
Issue
7B
Year of publication
1994
Pages
4157 - 4164
Database
ISI
SICI code
Abstract
Recent electron impact cross section data on CF4 are critically review ed and a cross-section data set suitable for plasma modeling purposes is suggested.