Investigations on nanoscale multilayers by analytical TEM in scanning mode

Nanoscale multilayers show properties completely different from bulk materi als and are of great interest in the modern materials science. The characte risation of their structure and composition requires methods with spatial r esolution of only few nanometers. The analytical transmission electron micr oscopy on cross sections is one of the most suitable methods. imaging and s pectroscopy of the same specimen details lead to essential information abou t correlation of structure and properties. The use of the analytical TEM wi th possibilities and limitations in the scanning mode will be demonstrated on four materials problems: oxygen bond in thin resistivity films (CuNi/NiC r), hard coating multilayers (TiN/Al2O3), and Fe/Al multilayers, as well as the degree of mixing within nanoscale Co/Cu multilayers.