ELECTRON-CYCLOTRON-RESONANCE DEVICES WITH PERMANENT-MAGNETS FOR PRODUCTION OF LARGE-DIAMETER UNIFORM PLASMAS

A review is presented of experimental devices with permanent magnets f or electron cyclotron resonance to produce large-diameter uniform plas mas. The devices are classified into 7 groups depending on device symm etry, magnet arrangement, plasma-drift direction and microwave couplin g. Their characteristic points are clarified and the most optimal devi ce construction and arrangement are discussed from a viewpoint of prod ucing uniform plasmas necessary for large-scale plasma processing.