Geometrical error compensation of precision motion systems using radial basis function

This paper describes a new method for geometrical error compensation of pre cision motion systems. The compensation is carried out with respect to an o verall geometrical error model which is constructed from the individual err or components associated with each axis of the machine. These error compone nts are modeled using radial basis functions (RBFs), thus dispensing with t he conventional look-up table. The adequacy and clear benefits of the propo sed approach are illustrated from an application to an XY table.