Sj. Spiegel et A. Madjar, Impact of light illumination and passivation layer on silicon finite-ground coplanar-waveguide transmission-line properties, IEEE MICR T, 48(10), 2000, pp. 1673-1679
Citations number
27
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES
Modeling of silicon finite-gronnd coplanar-waveguide (FGCPW) transmission l
ines is presented in this paper. It is shown that the effective substrate c
onductivity increases in the presence of illumination and in the presence o
f a passivation layer in the slot regions independently. As a result, the l
osses of trenched FGCPW are lower than conventional FGCPW transmission line
s. The strong dependence of the substrate conductivity on illumination sugg
ests that optically controlled attenuators can be implemented with FGCPW tr
ansmission lines exhibiting practically no phase change between the differe
nt attenuation states. A new contrast ratio for optically controlled transm
ission lines is derived.