Markovian timed Petri nets for performance analysis of semiconductor manufacturing systems

A subclass of generalized stochastic Petri Nets (GSPNs) with priorities, ca lled Markovian timed Petri nets, are proposed to model semiconductor manufa cturing systems that consider process priorities, routing priorities, resou rce re-entrance, and nonpreemptive operations, Uniformization technique is used to establish both lower and upper bounds of the performance of interes t. These bounds are computable using linear programming. Numerical experime nts have been conducted to evaluate the accuracy of the bounds using models adapted from real-world systems. The experiments show that the upper bound s are very close to the simulation results. Thus, performance measures can be accurately estimated using these bounds.