CYCLOTRON-RESONANCE MASS-SPECTROMETRY OF IONIC RADICALS IN MAGNETIZEDCF4 PLASMA

The mass distribution of ionic radicals in a magnetized CF4 plasma is measured by a newly developed ion cyclotron resonance mass spectromete r (ICR-MS). The density ratio of CF+ to CF?3?+ increases with plasma d ensity for DC discharge and decreases with CF4 pressure for electron c yclotron resonance discharge. Negative ions F- and Fz are detected at a CF4 gas pressure of 3-9 x 10(-4) Torr for DC discharge. Fragmentatio n of a CF4 gas by electron beam injection is also measured by this spe ctrometer.