In situ and ex situ characterization of thin films by soft X-ray emission spectroscopy

Soft X-ray emission spectroscopy has been used as a chemical probe in the c haracterization of thin film materials. Some examples of soft X-ray emissio n studies are presented to show the chemical sensitivity, site selectivity and depth dependence of this method. The substantial penetration of soft X- rays offers true bulk probing and facilitates studies of interfaces and bur ied structures. By choosing the proper geometry soft X-ray emission spectro scopy provides a non-destructive chemical analysis of sandwich structures. This technique has also been used to enable in situ and real-time character ization of thin films during vapor deposition growth. (C) 2000 Elsevier Sci ence BN. All rights reserved.