The rate at which a facetted tetragonal cavity of nonequilibrium shape appr
oaches a cubic equilibrium (Wulff) shape via surface diffusion was modeled.
The shape relaxation rate of a facetted "stretched cylinder" was also mode
led, For the first geometry, only an approximate solution based on lineariz
ing the mean potential difference between the source and sink facets was ob
tained. For the stretched cylinder, both an approximate and an exact soluti
on can be obtained; the approximate solution underestimates the evolution r
ate by a factor of approximate to 2, To assess the applicability of the mod
els, nonequilibrium shape pores of identical initial geometry (approximate
to 20 mu m x 20 mu m x 0.5 mu m) were introduced into (0001), {10 (1) over
bar 2}, {11 (2) over bar 0}, and {10 (1) over bar 0} surfaces of sapphire s
ingle crystals using microfabrication techniques, ion-beam etching, and hot
pressing. The large (approximate to 20 pm x 20 mu m) faces of the pore are
low-index surfaces whose nature is dictated by the wafer orientation. A se
ries of anneals was performed at 1900 degrees C, and the approach of the po
re shape to an equilibrium shape was monitored, The kinetics of shape evolu
tion are highly sensitive to the crystallographic orientation and stability
of the low-index surface that dominates the initial pore shape. The measur
ed variations of the pore aspect ratio were compared to those predicted by
the kinetic model. The observations suggest that when the initial bounding
surface is unstable, shape relaxation may be controlled by diffusion. Howev
er, surface-attachment-limited kinetics (SALK) appears to play a major role
in determining the pore shape evolution rate in cases where the initial bo
unding surfaces have orientations that are part of the Wulff shape.