We have directly observed the energy distributions of hot electrons in Si M
etal-Oxide-Semiconductor Field-Effect Transistors (MOSFETs). We used a Late
ral Hot-Electron Transistor (LHET) employing two potential barriers tan emi
tter barrier and a collector barrier) that divided the Si surface into thre
e regions (emitter, base, and collector). For an emitter-base voltage of -1
.2 V, hot electrons with an excess energy of 1.3eV were detected at the col
lector. The ratio of hot electrons to the injected electrons was 5.0%.