F. Dinelli et al., Mapping surface elastic properties of stiff and compliant materials on thenanoscale using ultrasonic force microscopy, PHIL MAG A, 80(10), 2000, pp. 2299-2323
The increasing production of nano-devices and nano-composite materials has
prompted the development of new instruments to probe smaller and smaller vo
lumes. Regarding mechanical properties in particular, modified atomic force
microscopes using force modulation at frequencies below the cantilever res
onance have been successfully employed to investigate relatively compliant
materials such as bio-materials and polymers but have shown limitations to
highly stiff materials. The alternative approach of ultrasonic force micros
copy (UFM) uses sample vibration at frequencies far above the cantilever pr
imary resonance, exploiting the inertial stiffness of an atomic force micro
scopy cantilever and detection of ultrasonic vibration via nonlinearity of
the tip-surface force interaction. In this paper we demonstrate that UFM ca
n discriminate elastic properties of materials ranging from quite stiff to
relatively compliant with a lateral resolution of a few nanometres and with
high sensitivity to the elastic modulus. Furthermore a phenomenon of ultra
sonically induced friction reduction permits imaging of fragile samples oth
erwise swept away in conventional contact mode atomic force microscopes. Th
e possible influence of adhesive properties also has been analysed and crit
eria for distinguishing elastic and adhesive contributions have been establ
ished. We also explore another promising application of UFM for detection o
f nanoscale subsurface delamination.