A soft lithography approach to the fabrication of nanostructures of singlecrystalline silicon with well-defined dimensions and shapes

Authors
Yin, YD Gates, B Xia, YN
Citation
Yd. Yin et al., A soft lithography approach to the fabrication of nanostructures of singlecrystalline silicon with well-defined dimensions and shapes, ADVAN MATER, 12(19), 2000, pp. 1426-1430
Citations number
28
Categorie Soggetti
Multidisciplinary,"Material Science & Engineering
Journal title
ADVANCED MATERIALS
ISSN journal
09359648 → ACNP
Volume
12
Issue
19
Year of publication
2000
Pages
1426 - 1430
Database
ISI
SICI code
0935-9648(20001002)12:19<1426:ASLATT>2.0.ZU;2-D