IN-SITU OBSERVATION OF PHOTODOPING PROCESS BY INFRARED ATTENUATED TOTAL-REFLECTION METHOD

Attenuated total reflection (ATR) spectra of a Ag/As2S3 double layer d eposited on a Ge prism were observed. Three samples having the As2S3 l ayer thicknesses of 750 Angstrom, 3000 Angstrom and 12000 Angstrom wer e studied. Characteristic spectra related to As2S3 thickness, light-ir radiation time and wave number were obtained. The spectra were fitted by a simulation procedure using a multilayer model. The spectra were w ell fitted by introducing the interface layer of a Ag cluster having t he thickness typically of 1 nm at the diffusion front of the photodope d region. Spectra and fitted results were discussed in relation to the photodoping mechanism.