ELECTRONIC AND STRUCTURAL CHARACTERIZATION OF BORON-DOPED HYDROGENATED SILICON THIN AND ULTRATHIN FILMS PREPARED BY RF MAGNETRON SPUTTERING(VOL 33, PG 42, 1994)

Authors
SHARMA SN BOSE S BANERJEE R BATABYAL AK BANERJEE D BHATTACHARYA R
Citation
Sn. Sharma et al., ELECTRONIC AND STRUCTURAL CHARACTERIZATION OF BORON-DOPED HYDROGENATED SILICON THIN AND ULTRATHIN FILMS PREPARED BY RF MAGNETRON SPUTTERING(VOL 33, PG 42, 1994), JPN J A P 1, 33(8), 1994, pp. 4799-4799
Citations number
1
Categorie Soggetti
Physics, Applied
Journal title
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS → ACNP
Volume
33
Issue
8
Year of publication
1994
Pages
4799 - 4799
Database
ISI
SICI code