Photoactive thin films of WS2 have been prepared by radio frequency ma
gnetron sputtering. Physico-chemical properties of the films are mainl
y investigated by Rutherford backscattering and X-ray diffraction. Opt
ical and transport properties are also studied. Films sputtered at a h
igh substrate temperature are made of small bidimensional grains (2H-W
S2) surrounded by amorphous boundaries. The photoactivity of these fil
ms is weak because of the electron trapping at boundaries. Films sputt
ered at a low substrate temperature are amorphous and then annealed to
produce bidimensional films. It is shown that annealed Ni-coated film
s give highly textured samples. A nickel-sulphur phase is assumed to a
ct as a surfactant. The strong photoactivity enhancement of these film
s is attributed to an increase in the grain size. (C) 1997 Elsevier Sc
ience S.A.