Xm. Xiong et al., MEASUREMENTS OF FILM THICKNESS AND GROWTH TEMPERATURE OF YBA2CU3O7-DELTA FILMS BY PYROMETRIC ABSORPTION METHOD, Chinese Physics Letters, 14(5), 1997, pp. 367-370
A pyrometric absorption method suitable for strongly absorbing films h
as been developed ro the YBa2Cu3O7-delta film growth. This method make
s use of the temperature difference between the heater and the substra
te. By deducing the absorption formula of radiation light and fitting
it to the radiation intensity data measured. it is possible to monitor
the film thickness monitor and the film surface temperature during de
position. Experimental results show that this is a simple and practica
ble method.