MEASUREMENTS OF FILM THICKNESS AND GROWTH TEMPERATURE OF YBA2CU3O7-DELTA FILMS BY PYROMETRIC ABSORPTION METHOD

Citation
Xm. Xiong et al., MEASUREMENTS OF FILM THICKNESS AND GROWTH TEMPERATURE OF YBA2CU3O7-DELTA FILMS BY PYROMETRIC ABSORPTION METHOD, Chinese Physics Letters, 14(5), 1997, pp. 367-370
Citations number
13
Categorie Soggetti
Physics
Journal title
ISSN journal
0256307X
Volume
14
Issue
5
Year of publication
1997
Pages
367 - 370
Database
ISI
SICI code
0256-307X(1997)14:5<367:MOFTAG>2.0.ZU;2-S
Abstract
A pyrometric absorption method suitable for strongly absorbing films h as been developed ro the YBa2Cu3O7-delta film growth. This method make s use of the temperature difference between the heater and the substra te. By deducing the absorption formula of radiation light and fitting it to the radiation intensity data measured. it is possible to monitor the film thickness monitor and the film surface temperature during de position. Experimental results show that this is a simple and practica ble method.