In situ cleaning of microfabricated field emitter cathodes

Authors
Schwoebel, PR Olson, RT Panitz, JA Brodie, AD
Citation
Pr. Schwoebel et al., In situ cleaning of microfabricated field emitter cathodes, J VAC SCI B, 18(5), 2000, pp. 2579-2582
Citations number
13
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
ISSN journal
10711023 → ACNP
Volume
18
Issue
5
Year of publication
2000
Pages
2579 - 2582
Database
ISI
SICI code
1071-1023(200009/10)18:5<2579:ISCOMF>2.0.ZU;2-8
Abstract
The use of microfabricated field emission cathodes in applications of techn ological importance has been hindered by difficulties in obtaining acceptab le emission characteristics in the vacuum environment of the device. We hav e investigated in situ surface cleaning and annealing using high pulsed ele ctron emission. Extraction of high current densities provides a reliable me ans to shape and clean microfabricated field emitter tips, thereby enhancin g their temporal stability and emission spatial uniformity. (C) 2000 Americ an Vacuum Society. [S0734-211X(00)00605-3].