An error separation technique for measuring straightness motion error of alinear slide

Citation
Ehk. Fung et Sm. Yang, An error separation technique for measuring straightness motion error of alinear slide, MEAS SCI T, 11(10), 2000, pp. 1515-1521
Citations number
14
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
MEASUREMENT SCIENCE & TECHNOLOGY
ISSN journal
09570233 → ACNP
Volume
11
Issue
10
Year of publication
2000
Pages
1515 - 1521
Database
ISI
SICI code
0957-0233(200010)11:10<1515:AESTFM>2.0.ZU;2-K
Abstract
A novel measurement system for on-machine determination of the straightness motion error and profile of a precision linear slide for active error comp ensation (AEC) purposes has successfully been developed. The characteristic s of the proposed measurement method an: (i) the profile is determined unde r on-machine conditions requiring no pre-calibration; and (ii) a novel appr oach involving representation of the test section of the profile by one cyc le of a periodic function is facilitated by specially arranging three senso rs to form a stationary stage. In this paper, the principles and operation of the measurement method are presented. The approach of defining a periodi c function to deal with the problem of non-periodicity of a profile is then described. A preliminary analysis of the sensor measurement errors is also given. Finally, the measurement system consisting of three non-contact cap acitive sensors is built and evaluated experimentally on a laboratory lathe and good reproducibility of profile results is obtained.