Radial shearing interferometer for in-process measurement of diamond turning

Authors
Kohno, T Matsumoto, D Yazawa, T Uda, Y
Citation
T. Kohno et al., Radial shearing interferometer for in-process measurement of diamond turning, OPT ENG, 39(10), 2000, pp. 2696-2699
Citations number
6
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Optics & Acoustics
Journal title
OPTICAL ENGINEERING
ISSN journal
00913286 → ACNP
Volume
39
Issue
10
Year of publication
2000
Pages
2696 - 2699
Database
ISI
SICI code
0091-3286(200010)39:10<2696:RSIFIM>2.0.ZU;2-I
Abstract
A stable interferometer with two zone plates to measure a concave mirror fi gure is developed. The principle of the measurement is based on the radial shearing interference in which the measuring wave-front from the entire mir ror surface under test is referred to that from the central part. On-machin e experiments show that the interferometer is stable and compact enough to be applicable to in-process measurement for diamond turning at about 0.06 m um p-v accuracy. (C) 2000 society of Photo-Optical Instrumentation Engineer s. [S0091-3286(00)01010-2].