Multichannel Mueller matrix ellipsometer for real-time spectroscopy of anisotropic surfaces and films

A multichannel ellipsometer in the dual-rotating-compensator configuration has been developed for potential applications in real-time Mueller matrix s pectroscopy of anisotropic surfaces and films. This instrument provides spe ctra (1.7-5.3 eV) in all 16 elements of the unnormalized Mueller matrix M o f a film-substrate system with a minimum overall data acquisition time of t (alpha) = 0.25 s. We have applied this instrument first for high-precision determination of spectra in M with t(alpha) = 2.5 s for a microscopically s culptured film. (C) 2000 Optical Society of America OCIS codes: 120.2130, 2 60.2130, 310.3840, 260.1180, 310.6860, 120.6200.