LOW-TEMPERATURE POLYSILICON RESHAPES FPD PRODUCTION

Many liquid crystal display (LCD) manufacturers are devoting considera ble effort to the development of low-temperature polysilicon (LTPS) te chnology because it promises to produce higher-performance displays at lower cost. The success of LTPS depends on new device structures, new processes, and process equipment designed specifically for this techn ology. Part 1 of this article (in SST's May 1997 issue) discussed LTPS deposition and crystallization. This part looks at necessary changes to other aspects of active matrix liquid crystal display (AMLCD) manuf acturing.