Preparation and characterization of cerium (IV) oxide thin films by spray prolysis method

Cerium (IV) oxide films were deposited on silicon substrates by nebulizatio n of a 0.01 M solution of cerium acetylacetonate in a 50% ethanol-water mix ture followed by pyrolysis in flowing air. The films were characterized by X-ray diffraction, scanning electron microscopy and atomic force microscopy . On the basis of the experimental evidence, the technical conditions were selected. Appropriate control of the ratio of pulse time to interval time w as found to be necessary for obtaining high quality and greater crystallite size cerium (IV) oxide thin films. (C) 2000 Published by Elsevier Science B.V.