Analysis of sub-boil distilled water, hydrochloric and nitric acid for trace element impurities by ICP-MS

A method has been designed for the precise estimation of a few trace and ul tra-trace elements in high purity sub-boil distilled water and hydrochloric and nitric acids using inductively coupled plasma mass spectrometers of tw o different makes. The trace element concentrations of majority of the elem ents analysed in sub-boil distilled water are found to be below detection l imits. A comparison of the trace element impurity levels obtained in hydroc hloric and nitric acids with the maximum allowable impurity levels for high purity reagents documented in SEMI, suggests that these purity levels conf irm with the specifications given for the high pure reagents.