The photothermal ionization spectroscopy (PTIS) was employed to study Be sh
allow acceptor states in MBE-grown GaAs films. The G line, C line and D lin
e transitions were observed and attributed to the ones from the ground stat
e 1S(3/2)(Gamma (+)(8)) Of Be acceptor to the first three excited odd-parit
y states 2p(3/2)(Gamma (-)(8)) , 2p(5/2)(Gamma (-)(8)) and 2p(5/2) (Gamma (
+)(8)), respectively throngh comparison with theoretical calculation. The t
ransition from the ground state 1s(3/2) (Gamma (+)(8)) to the excited state
2p(1/2)(Gamma (-)(6)) was also observed. According to the PTIS, the bindin
g energy of Be acceptor in GaAs was deduced to be 28. 6meV.