Improvements in bis(cyclopentadienyl) magnesium purity as determined with gas chromatography-mass spectroscopy

Bis(cyclopentadienyl) magnesium (MgCp2) is used commonly as a source for do ping nitride materials with magnesium. Increased oxygen incorporation known to accompany the use of MgCp2 makes the purity of this precursor an import ant consideration in nitride CVD. Gas chromatography-mass spectroscopy (GCM S) methods have now been developed for the identification of volatile impur ities in MgCp2. Diethylether, an oxygen containing organic compound (CH3CH2 OCH2CH3), and additional organic impurities were found in the MgCp2 supplie d by three manufacturers. Subsequent refinements in the synthetic processes by these companies have resulted in the availability of MgCp2 free of ethe r and other organic impurities as determined by GCMS.